TOF-SIMS is a very sensitive surface analysis technique that provides detailed elemental and molecular information about the surface, thin layers, and interfaces of the sample at a depth of one to three monolayers from the topmost surface.
- Simultaneous detection of all elements (ppm/ppb range)
- Small surface areas
- In-depth distribution
- Backside contaminants
- Inorganic and organic
- Particle analysis
- Ultra-thin dielectric layers (Oxinitrides, High-k)
- Nitrogen content, Oxide thickness
- High sensitivity
- Parallel mass detection
- Failure analysis
TOF-SIMS spectrum of poly-ethylene-terephthalate (PET) showing mass peaks for fragments of PET molecule.