TOF-SIMS is a very sensitive surface analysis technique that provides detailed elemental and molecular information about the surface, thin layers, and interfaces of the sample at a depth of one to three monolayers from the topmost surface.

Applications

  • Trace Metal Detection / Quantification

- Simultaneous detection of all elements (ppm/ppb range)

- Small surface areas
(patterned wafers)

- In-depth distribution

- Backside contaminants

  • Screening for Contaminants

          - Inorganic and organic

- Particle analysis

  • Gate Oxide analysis

- Ultra-thin dielectric layers (Oxinitrides, High-k)

- Nitrogen content, Oxide thickness

  • Analysis of shallow Implants

- High sensitivity

- Parallel mass detection
(contaminant screening)

- Failure analysis

  • Interface, bond pad, test pad analysis
  • Defect and particle analysis

TOF-SIMS Results

 

TOF-SIMS spectrum of poly-ethylene-terephthalate (PET) showing mass peaks for fragments of PET molecule.

 

Friday, 15 December 2017
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